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Defects in TiN and TiAIN coatings grown by combined cathodic arc/unbalanced magnetron technology
W-D Münz, DB Lewis, S Creasey, T Hurkmans, T Trinh, Wv IjzendornVolume:
46
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0042-207x(94)e0029-x
File:
PDF, 894 KB
english, 1995