Development of a new ionization gauge with Bessel Box type...

Vacuum 1995 Vol. 46; Iss. 8-10

Development of a new ionization gauge with Bessel Box type energy analyzer

H Akimichi, T Tanaka, K Takeuchi, Y Tuzi, I Arakawa
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Volume:
46
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(95)00030-5
File:
PDF, 452 KB
english, 1995
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