Rotary vane and roots pumps backed by diaphragm pumps—progress in corrosive applications and clean vacuum requirements
FJ Eckle, P Bickert, R LachenmannVolume:
46
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(95)00041-0
File:
PDF, 309 KB
english, 1995