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Refrigerator cryopump with a simple oil-free roughing pump
U Timm, HH Klein, S Schreck, H-U Häfner, M Mattern-Klosson, HJ MundingerVolume:
46
Year:
1995
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(95)00062-3
File:
PDF, 254 KB
english, 1995