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Elemental composition and structural properties of thin rf sputtered Ta2O5 layers
E Atanassova, T Dimitrova, J KoprinarovaVolume:
46
Year:
1995
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(95)00065-8
File:
PDF, 376 KB
english, 1995