Arsenic ion beam induced mixing in Ta/Pd thin films on silicon
N Bibić, ZH Jafri, M Milosavljević, D PeruškoVolume:
46
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(95)00067-4
File:
PDF, 849 KB
english, 1995