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Synthesis of zirconium nitride films monitored by in situ soft X-ray spectrometry
JP Dauchot, S Edart, M Wautelet, M HecqVolume:
46
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(95)00074-7
File:
PDF, 411 KB
english, 1995