Laser reactive ablation deposition of TiC films

Vacuum 1995 Vol. 46; Iss. 8-10

Laser reactive ablation deposition of TiC films

G Leggieri, A Luches, A Perrone, G Majni, P Mengucci
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Volume:
46
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(95)00090-9
File:
PDF, 1007 KB
english, 1995
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