Depth profiling of thin film heterostructure materials by secondary ion mass spectrometry
EO Ristolainen, M Puga-Lambers, B Panthangay, PH HollowayVolume:
46
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(95)00098-4
File:
PDF, 433 KB
english, 1995