Electrical characterization of sputter-deposition-induced...

Vacuum 1995 Vol. 46; Iss. 8-10

Electrical characterization of sputter-deposition-induced defects in epitaxially grown n-GaAs layers

F Danie Auret, SA Goodman, G Myburg, WO Barnard
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Volume:
46
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(95)00112-3
File:
PDF, 506 KB
english, 1995
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