Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition
MF Cerqueira, M Andritschky, L Rebouta, JA Ferreira, MF da SilvaVolume:
46
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0042-207x(95)00158-1
File:
PDF, 748 KB
english, 1995