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Depth profile analysis of porous Si film by ERDA using a ΔE — E detector telescope
DK Avasthi, SK Hui, ET Subramaniyam, BR MehtaVolume:
47
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(96)00154-6
File:
PDF, 451 KB
english, 1996