Geometrical properties of multilayer...

Microelectronic Engineering 2012 / 10 Vol. 98

Geometrical properties of multilayer nano-imprint-lithography molds for optical applications

Finn, Andreas, Hensel, René, Hagemann, Falk, Kirchner, Robert, Jahn, Andreas, Fischer, Wolf-Joachim
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.04.022
Date:
October, 2012
File:
PDF, 530 KB
english, 2012
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