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Annealing effects on the properties of Ga2O3 thin films grown on sapphire by the metal organic chemical vapor deposition
KIM, HVolume:
230
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/S0169-4332(04)00186-2
Date:
May, 2004
File:
PDF, 330 KB
english, 2004