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The measurement of nano dimension standard by laser focus sensor
Lei, Lihua, Li, Yuan, Fan, Guofang, Li, TongbaoVolume:
203
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.09.022
Date:
December, 2013
File:
PDF, 730 KB
english, 2013