Diamond-like carbon thin films grown by large-area...

Diamond and Related Materials 2006 / 4 Vol. 15; Iss. 4-8

Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window

Adhikari, Sudip, Omer, Ashraf M.M., Adhikary, Sunil, Rusop, Mohamad, Uchida, Hideo, Umeno, Masayoshi
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Volume:
15
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.12.012
Date:
April, 2006
File:
PDF, 197 KB
english, 2006
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