Nanotribological study of PECVD DLC and reactively...

Diamond and Related Materials 2006 / 10 Vol. 15; Iss. 10

Nanotribological study of PECVD DLC and reactively sputtered Ti containing carbon films

Kvasnica, S., Schalko, J., Eisenmenger-Sittner, C., Benardi, J., Vorlaufer, G., Pauschitz, A., Roy, M.
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Volume:
15
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2006.03.005
Date:
October, 2006
File:
PDF, 4.29 MB
english, 2006
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