APCVD of ZnO:Al, insight and control by modeling

Surface and Coatings Technology 2013 / 09 Vol. 230

APCVD of ZnO:Al, insight and control by modeling

van Deelen, J., Illiberi, A., Kniknie, B., Steijvers, H., Lankhorst, A., Simons, P.
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Volume:
230
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.055
Date:
September, 2013
File:
PDF, 775 KB
english, 2013
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