Thin silicon films deposited at low substrate temperatures...

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Thin Solid Films 2003 / 12

Thin silicon films deposited at low substrate temperatures studied by surface photovoltage technique

Luterová, K
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/S0040-6090(03)01498-6
Date:
December, 2003
File:
PDF, 364 KB
english, 2003
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