Integration of rotated 3-D structures into pre-patterned...

Microelectronic Engineering 2012 / 10 Vol. 98

Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography

Haatainen, T., Mäkelä, T., Schleunitz, A., Grenci, G., Tormen, M.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.042
Date:
October, 2012
File:
PDF, 625 KB
english, 2012
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