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Optimized germanium co-implant with B2H6 PLAD for better advanced PMOS device performance
Liu, Lequn Jennifer, Qin, Shu, Hu, Yongjun Jeff, Mcteer, AllenVolume:
229
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.05.003
Date:
August, 2013
File:
PDF, 812 KB
english, 2013