Electromigration challenges for advanced on-chip Cu...

Electromigration challenges for advanced on-chip Cu interconnects

Li, Baozhen, Christiansen, Cathryn, Badami, Dinesh, Yang, Chih-Chao
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Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.01.005
Date:
April, 2014
File:
PDF, 2.86 MB
english, 2014
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