Effect of VHF excitation frequency on localized deposition...

Surface and Coatings Technology 2013 / 6 Vol. 225

Effect of VHF excitation frequency on localized deposition of silicon in non-equilibrium-plasma-enhanced CVD by an under-expanded supersonic jet

Kuribayashi, Shizuma, Tsunekawa, Yoshihiro, Akahori, Shoji, Ando, Daisuke, Nakamura, Jiro, Nishida, Satoshi, Muta, Hiroshi, Takeuchi, Yoshiaki, Yamauchi, Yasuhiro, Takatsuka, Hiromu
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Volume:
225
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.03.018
Date:
June, 2013
File:
PDF, 617 KB
english, 2013
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