Design and analysis of an innovative light tracking device...

Microelectronic Engineering 2014 / 05 Vol. 119

Design and analysis of an innovative light tracking device based on opto-thermo-electro-mechanical actuators

Mahmoudpour, Masihollah, Zabihollah, Abolghassem, Vesaghi, Mohammad, Kolbadinejad, Mohadese
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Volume:
119
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.01.019
Date:
May, 2014
File:
PDF, 703 KB
english, 2014
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