Evaluation of critical stress intensity for crack...

Thin Solid Films 2013 / 06 Vol. 537

Evaluation of critical stress intensity for crack initiation and rising R-curve behavior in wurtzitic AlN film grown on (001)Si substrate

Zhu, Wenliang, Leto, Andrea, Hashimoto, Ken-ya, Pezzotti, Giuseppe
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Volume:
537
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.04.081
Date:
June, 2013
File:
PDF, 516 KB
english, 2013
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