Design of control oxide thickness for multi-level storage...

Design of control oxide thickness for multi-level storage in a stepped NFGM MOSCAP

Kim, Ji-Young, Seo, Jun-Hyuk, Moon, Young-Woong, Choi, Duck-Kyun
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Volume:
13
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2013.01.005
Date:
July, 2013
File:
PDF, 865 KB
english, 2013
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