The role of inert gas in MW-enhanced plasmas for the...

Diamond and Related Materials 2009 / 5 Vol. 18; Iss. 5-8

The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

Fox, O.J.L., Ma, J., May, P.W., Ashfold, M.N.R., Mankelevich, Yu.A.
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Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.01.004
Date:
May, 2009
File:
PDF, 710 KB
english, 2009
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