Lithography-free fabrication of single crystalline silicon...

Microelectronic Engineering 2012 / 10 Vol. 98

Lithography-free fabrication of single crystalline silicon tubular nanostructures on large area

Jung, Hak-Kyun, Choi, Jungwook, Na, Hyungjoo, Kwon, Dae-Sung, Kim, Min-Ook, Kang, Jeong-Jin, Kim, Jongbaeg
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.079
Date:
October, 2012
File:
PDF, 932 KB
english, 2012
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