Hydrogen incorporation in CNx films deposited by ECR...

Diamond and Related Materials 2003 / 3 Vol. 12; Iss. 3-7

Hydrogen incorporation in CNx films deposited by ECR chemical vapor deposition

Camero, M., Gago, R., Gómez-Aleixandre, C., Albella, J.M.
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00400-4
Date:
March, 2003
File:
PDF, 102 KB
english, 2003
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