A comparative study of the HF sorption and outgassing...

Microelectronic Engineering 2013 / 5 Vol. 105

A comparative study of the HF sorption and outgassing ability of different Entegris FOUP platforms and materials

González-Aguirre, Paola, Fontaine, Hervé, Beitia, Carlos, Ohlsen, Jim, Lundgren, Jorgen, Lee, Poshin
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Volume:
105
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.12.005
Date:
May, 2013
File:
PDF, 756 KB
english, 2013
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