New Approach for the Ablation of Dielectrics from Silicon...

Energy Procedia 2013 Vol. 38

New Approach for the Ablation of Dielectrics from Silicon Using Long Wavelength Lasers

Thorstensen, Jostein, Foss, Sean Erik
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Volume:
38
Year:
2013
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2013.07.347
File:
PDF, 865 KB
english, 2013
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