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New method for boron removal from silicon by electron beam injection
Tan, Yi, Qin, Shiqiang, Wen, Shutao, Li, Jiayan, Shi, Shuang, Jiang, Dachuan, Pang, DayuVolume:
18
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.10.006
Date:
February, 2014
File:
PDF, 715 KB
english, 2014