MWPACVD diamond homoepitaxial growth: role of the plasma...

Diamond and Related Materials 1995 / 4 Vol. 4; Iss. 4

MWPACVD diamond homoepitaxial growth: role of the plasma and the substrate parameters

Findeling-Dufour, C., Vignes, A., Gicquel, A.
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Volume:
4
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(94)05316-2
Date:
April, 1995
File:
PDF, 859 KB
english, 1995
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