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Investigation of the amorphous to microcrystalline phase transition of thin film prepared by electron cyclotron resonance chemical vapor deposition method
Chang, Teng-Hsiang, Chang, Jenq-Yang, Chu, Yen-Ho, Lee, Chien-Chieh, Chen, I-Chen, Li, TomiVolume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.10.008
Date:
September, 2013
File:
PDF, 868 KB
english, 2013