Enhancing proton beam writing system with auto scanning software and stage movement
Nguyen, Truong Phi, Teshima, Ryo, Hasegawa, Tadahiro, Nishikawa, HiroyukiVolume:
102
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.02.015
File:
PDF, 1.13 MB
english, 2013