Enhancing proton beam writing system with auto scanning...

Enhancing proton beam writing system with auto scanning software and stage movement

Nguyen, Truong Phi, Teshima, Ryo, Hasegawa, Tadahiro, Nishikawa, Hiroyuki
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Volume:
102
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.02.015
File:
PDF, 1.13 MB
english, 2013
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