Structural modifications of silicon-doped carbon nitride films during post-deposition annealing
Fernández-Ramos, C., Sánchez-López, J.C., Rojas, T.C., Fernández, A.Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00328-X
Date:
March, 2003
File:
PDF, 568 KB
english, 2003