Metal based micro-feature fabrication using biomachining process
Istiyanto, Jos, Saragih, Agung-Shamsuddin, Ko, Tae JoVolume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.002
Date:
October, 2012
File:
PDF, 1.04 MB
english, 2012