Extended defects and precipitation in heavily B-doped silicon
Cojocaru-Mirédin, O., Cristiano, F., Fazzini, P.-F., Mangelinck, D., Blavette, D.Volume:
534
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.01.090
Date:
May, 2013
File:
PDF, 1.08 MB
english, 2013