Theoretical modeling of microfabricated beams with...

Theoretical modeling of microfabricated beams with elastically restrained supports

. Qingyuan Meng, M. Mehregany, R. Mullen
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Volume:
2
Year:
1993
Language:
english
DOI:
10.1109/84.260257
File:
PDF, 770 KB
english, 1993
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