Generation of diamond wire sliced wafer surface based on...

International Journal of Precision Engineering and Manufacturing 2014 / 05 Vol. 15; Iss. 5

Generation of diamond wire sliced wafer surface based on the distribution of diamond grits

C. Chung, L. V. Nhat
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Volume:
15
Language:
english
DOI:
10.1007/s12541-014-0401-2
Date:
May, 2014
File:
PDF, 878 KB
english, 2014
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