A compact new-concept ellipsometer for accurate large scale thin film measurements
Koops, Richard, Sonin, Petro, van Veghel, Marijn, El Gawhary, OmarVolume:
16
Language:
english
Journal:
Journal of Optics
DOI:
10.1088/2040-8978/16/6/065701
Date:
June, 2014
File:
PDF, 858 KB
english, 2014