Significant Enhancement of the Dielectric Constant through the Doping of CeO 2 into HfO 2 by Atomic Layer Deposition
Kim, Woo-Hee, Kim, Min-Kyu, Oh, Il-Kwon, Maeng, Wan Joo, Cheon, Taehoon, Kim, Soo-Hyun, Noori, Atif, Thompson, David, Chu, Schubert, Kim, Hyungjun, Dunn, B.Volume:
97
Language:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.12762
Date:
April, 2014
File:
PDF, 618 KB
english, 2014