Ion energy distributions for the identification of active...

Plasma Sources Science and Technology 2009 / 08 Vol. 18; Iss. 3

Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges

Tanarro, I, Herrero, V J
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Volume:
18
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/18/3/034007
Date:
August, 2009
File:
PDF, 442 KB
english, 2009
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