Polycrystalline Silicon Nanowires Synthesis Compatible With...

IEEE Transactions on Electron Devices 2014 / 02 Vol. 61; Iss. 2

Polycrystalline Silicon Nanowires Synthesis Compatible With CMOS Technology for Integrated Gas Sensing Applications

Rogel, Regis, Jacques, Emmanuel, Pichon, Laurent, Salaun, Anne Claire
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2295511
Date:
February, 2014
File:
PDF, 1.08 MB
english, 2014
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