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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Effects of CMP Slurry Chemistry on Agglomeration of Alumina and Copper Surface Hardness
Ihnfeldt, Robin V., Talbot, Jan B.Volume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2819478
File:
PDF, 237 KB
english, 2007