Study of atomic layer deposited ZrO 2...

physica status solidi (a) 2014 / 02 Vol. 211; Iss. 2

Study of atomic layer deposited ZrO 2 and ZrO 2 /TiO 2 films for resistive switching application

Kärkkänen, Irina, Shkabko, Andrey, Heikkilä, Mikko, Niinistö, Jaakko, Ritala, Mikko, Leskelä, Markku, Hoffmann-Eifert, Susanne, Waser, Rainer
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Volume:
211
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201330034
Date:
February, 2014
File:
PDF, 1.08 MB
english, 2014
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