Formation of β-FeSi 2...

Japanese Journal of Applied Physics 1997 / 6 Vol. 36; Iss. Part 1, No

Formation of β-FeSi 2 Layers on Si(001) Substrates

Tanaka, Masaya, Kumagai, Yoshinao, Suemasu, Takashi, Hasegawa, Fumio
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.3620
Date:
June, 1997
File:
PDF, 1.51 MB
1997
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