[IEEE Proceedings of 2010 International Symposium on VLSI Technology, System and Application - Hsin Chu, Taiwan (2010.04.26-2010.04.28)] Proceedings of 2010 International Symposium on VLSI Technology, System and Application - Scalability with silicon nitride encapsulation layer for Ti/HfOx pillar RRAM
Gu, Pei-Yi, Chen, Yu-Sheng, Lee, Heng-Yuan, Chen, Pang-Shiu, Liu, Wen-Hsing, Chen, Wei-Su, Hsu, Yen-Ya, Chen, Frederick, Tsai, Ming-JinnYear:
2010
Language:
english
DOI:
10.1109/VTSA.2010.5488909
File:
PDF, 948 KB
english, 2010