Fabrication of PZT MEMS energy harvester based on silicon...

Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method

Lin, Shun-Chiu, Wu, Wen-Jong
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125028
Date:
December, 2013
File:
PDF, 2.34 MB
english, 2013
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