![](/img/cover-not-exists.png)
Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method
Lin, Shun-Chiu, Wu, Wen-JongVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125028
Date:
December, 2013
File:
PDF, 2.34 MB
english, 2013