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Three dimensional modeling of LPCVD vertical cold wall reactors
S. Ait Amer, J.P. Couderc, P. DuverneuilVolume:
18
Year:
1994
Language:
english
Pages:
1
DOI:
10.1016/0098-1354(94)80039-1
File:
PDF, 300 KB
english, 1994